JPH069026Y2 - 粒体供給装置 - Google Patents
粒体供給装置Info
- Publication number
- JPH069026Y2 JPH069026Y2 JP1989138603U JP13860389U JPH069026Y2 JP H069026 Y2 JPH069026 Y2 JP H069026Y2 JP 1989138603 U JP1989138603 U JP 1989138603U JP 13860389 U JP13860389 U JP 13860389U JP H069026 Y2 JPH069026 Y2 JP H069026Y2
- Authority
- JP
- Japan
- Prior art keywords
- supply pipe
- granules
- particles
- collision
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989138603U JPH069026Y2 (ja) | 1989-12-01 | 1989-12-01 | 粒体供給装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989138603U JPH069026Y2 (ja) | 1989-12-01 | 1989-12-01 | 粒体供給装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0378072U JPH0378072U (en]) | 1991-08-07 |
JPH069026Y2 true JPH069026Y2 (ja) | 1994-03-09 |
Family
ID=31685692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989138603U Expired - Lifetime JPH069026Y2 (ja) | 1989-12-01 | 1989-12-01 | 粒体供給装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH069026Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW503265B (en) * | 1995-12-28 | 2002-09-21 | Mitsubishi Material Silicon | Single crystal pulling apparatus |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6411594A (en) * | 1987-07-06 | 1989-01-17 | Sanyo Electric Co | Washing machine |
-
1989
- 1989-12-01 JP JP1989138603U patent/JPH069026Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0378072U (en]) | 1991-08-07 |
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