JPH069026Y2 - 粒体供給装置 - Google Patents

粒体供給装置

Info

Publication number
JPH069026Y2
JPH069026Y2 JP1989138603U JP13860389U JPH069026Y2 JP H069026 Y2 JPH069026 Y2 JP H069026Y2 JP 1989138603 U JP1989138603 U JP 1989138603U JP 13860389 U JP13860389 U JP 13860389U JP H069026 Y2 JPH069026 Y2 JP H069026Y2
Authority
JP
Japan
Prior art keywords
supply pipe
granules
particles
collision
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989138603U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0378072U (en]
Inventor
正道 大久保
義正 宮崎
勝己 中谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP1989138603U priority Critical patent/JPH069026Y2/ja
Publication of JPH0378072U publication Critical patent/JPH0378072U/ja
Application granted granted Critical
Publication of JPH069026Y2 publication Critical patent/JPH069026Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1989138603U 1989-12-01 1989-12-01 粒体供給装置 Expired - Lifetime JPH069026Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989138603U JPH069026Y2 (ja) 1989-12-01 1989-12-01 粒体供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989138603U JPH069026Y2 (ja) 1989-12-01 1989-12-01 粒体供給装置

Publications (2)

Publication Number Publication Date
JPH0378072U JPH0378072U (en]) 1991-08-07
JPH069026Y2 true JPH069026Y2 (ja) 1994-03-09

Family

ID=31685692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989138603U Expired - Lifetime JPH069026Y2 (ja) 1989-12-01 1989-12-01 粒体供給装置

Country Status (1)

Country Link
JP (1) JPH069026Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW503265B (en) * 1995-12-28 2002-09-21 Mitsubishi Material Silicon Single crystal pulling apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6411594A (en) * 1987-07-06 1989-01-17 Sanyo Electric Co Washing machine

Also Published As

Publication number Publication date
JPH0378072U (en]) 1991-08-07

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